Mott adds that as more semiconductor manufacturing companies have moved to 300 mm and now 450 mm platforms, the gas volumes required for various processes and tools has increased dramatically. To meet these new requirements, the new ultra high purity gas filters have been specifically designed to meet the need to greater volumes of gas with superior filtration and pressure drop performance. These filters give semiconductor facilities and gas delivery system engineers a compact, robust, high efficiency filter option.According to Mott, the GasShield® Defender DEF2000 Series Filters are designed to provide 9 log reduction of particles (99.9999999%) down to 3 nm at flow rates of over 2,000 slpm. Maximum operating pressures is 2,500 psig (172.50 barg) and maximum operating temperatures up to 450°C (842°F).The DEF2000 is designed for high flow bulk specialty and inert gas delivery systems.The GasShield® Defender DEF4000 Series Filters are designed to provide 9 log reduction of particles (99.9999999%) down to 3 nm at flow rates over 4,000 slpm. With good filtration capacity, the DEF4000 allows gas delivery systems engineers to reduce the footprint of the bulk gas filter skids, gas panels, and other gas pad equipment significantly.
