For decades, tungsten was the material of choice for semiconductor interconnects. But as device dimensions shrink to the nanometer scale, tungsten faces mounting challenges – including higher resistivity and limited electromigration resistance. Molybdenum is emerging as a superior alternative, offering lower resistivity, better step coverage in tight geometries, and enhanced electromigration resistance, making it ideally suited for advanced nodes and 3D architectures.
Integrating molybdenum into semiconductor manufacturing requires atomic layer deposition (ALD), necessitating specialized filtration solutions to ensure process stability and reliability.
Mott’s GasShield HiFlow sandwich filter is the first point-of-use filtration solution specifically engineered for corrosive, ultra-low-vapor-pressure precursor delivery. Designed to meet the demands of ALD and advanced material processes, the filter provides particle retention of >9 LRV at 1.5 nm per SEMI F38-0720, all-metal construction to eliminate shedding and outgassing, and exceptional corrosion resistance, with an available Alloy C-22 option for halogenated precursors.
The filter also offers high-temperature stability (up to 460°C), superior flow efficiency (25–35% lower pressure drop than traditional disc filters), and ultra-high purity, ensuring moisture levels below 10 ppb and hydrocarbons beneath detection limits. With its compact 1.12" x 1.12" x 0.49" form factor, the GasShield HiFlow sandwich filter integrates seamlessly into tight tool layouts, OEM gas boxes, and high-temperature environments.
Mott’s latest gas delivery system provides enhanced material compatibility for emerging precursors, stable flow rates (≤2% part-to-part variation), and a five-year reliability guarantee under standard use conditions. The filter’s plug-and-play installation supports both C-seal and custom W-seal options, for convenient integration. With its advanced performance and long-term durability, the GasShield HiFlow sandwich filter sets a new standard in ALD filtration technology.
“As semiconductor fabs and OEMs push the boundaries of device performance, Mott remains at the forefront of filtration innovation,” said Paul Hofemann, semiconductor expert at Mott. “The GasShield HiFlow sandwich filter is a critical enabler of More-than-Moore fabrication, ensuring higher yields, cleaner processes, and more reliable performance in ALD-based molybdenum deposition.”
