The MV Multi-Trap High-Capacity Vacuum Inlet Trap for processes that generate large particulates features one 13 inch H x 14 inch diameter filter made from a pleated high-temperature polyester. Providing a 40 ft2 surface area, this trap can retain 60 gms/ft2 of particulates which makes it suitable for protecting vacuum pumps in LPCVD, PECVD, and ALD processes.
Available with 25 micron and 100 micron ratings, this single filter for the MV Multi-Trap High-Capacity Vacuum Inlet Trap fits a standard 16 inch dianeter all stainless steel housing with ISO 160 ports offered in straight-through and right angle configurations and provides conductance > 2000 CFM at 1 TORR. A retrofit kit is available for MV Multi-Trap 16 inch models currently in use.
