The award, which follows a previously announced Preliminary Memorandum of Terms, will be received in installments based on achievement of agreed-upon milestones.
Entegris is the first supplier to semiconductor manufacturers to finalize the terms of its award agreement under the CHIPS and Science Act. The funding will support the company’s continued development of a state-of-the-art center in Colorado Springs designed to create products critical to the future of semiconductor manufacturing in the US.
The center, which is targeted to begin initial commercial operations in 2025, will support production of liquid filtration products, as well as semiconductor wafer carriers known as Front-Opening-Unified Pods (FOUPs). These solutions are critical to helping customers improve manufacturing yields.
“Expanding our presence in the US is an important part of creating a stronger and more resilient domestic semiconductor ecosystem. We are very proud to be the first supplier to semiconductor manufacturers to receive this important federal support,” said Bertrand Loy, president and CEO of Entegris.