Entegris awarded up to US$77mn in direct funding under CHIPS Act

Entegris Inc and the US Department of Commerce have entered into a definitive agreement providing for up to US$77 million in funding under the CHIPS and Science Act.

Entegris' Manufacturing Center of Excellence in Colorado Springs will create products critical to the future of semiconductor manufacturing in the US
Entegris' Manufacturing Center of Excellence in Colorado Springs will create products critical to the future of semiconductor manufacturing in the US - Photo: Entegris.

The award, which follows a previously announced Preliminary Memorandum of Terms, will be received in installments based on achievement of agreed-upon milestones.

Entegris is the first supplier to semiconductor manufacturers to finalize the terms of its award agreement under the CHIPS and Science Act. The funding will support the company’s continued development of a state-of-the-art center in Colorado Springs designed to create products critical to the future of semiconductor manufacturing in the US.

The center, which is targeted to begin initial commercial operations in 2025, will support production of liquid filtration products, as well as semiconductor wafer carriers known as Front-Opening-Unified Pods (FOUPs). These solutions are critical to helping customers improve manufacturing yields.

“Expanding our presence in the US is an important part of creating a stronger and more resilient domestic semiconductor ecosystem. We are very proud to be the first supplier to semiconductor manufacturers to receive this important federal support,” said Bertrand Loy, president and CEO of  Entegris.