Ebara’s new exhaust gas treatment equipment, the TND-Single model and the TND-Single Plus model are for use in the manufacturing of semiconductors.
With the rapid advance of the Internet of Things (IoT) and AI, demands for higher efficiency in exhaust gas treatment and extended intervals between maintenance with deposit measures are increasing within semiconductor manufacturing.
The new TND Series is equipped with a new type of burner, which enables efficient incineration with reduced loss of thermal energy and achieves low NOx and low CO. There is also an auto deposit removal function, a wet wall form function and an inner tank stirring function, all of which extend the maintenance interval up to six times longer than existing products.
The addition of a water treatment process before the burner removes process gases that generate a large amount of deposits, such as SiN and TiN, significantly reduces the amount of powder generated inside the burner.
Ebara will display the TND-Single model and TND-Single Plus model at SEMICON Japan, which takes place in Tokyo from 11-13 December 2019.
