The new Evoqua Ultrapure Water Technology facility enables microelectronics customers to perform operational demonstrations and testing of the Vanox® POU system - an advanced oxidation process for total organic compound (TOC) reduction in semiconductor manufacturing, especially for geometries of less than 28 nanometers (nm). The new facility also allows the microelectronics industry to test and validate TOC reduction on their process water streams.
Evoqua’s microelectronics development capabilities include an advanced ion exchange resin development and analysis laboratory. The Rockford, Illinois centre of excellence already has a membrane autopsy centre, a resin and water chemistry laboratory, a state of the art resin conditioning plant and a steam condensate resin regeneration facility.
Evoqua Industrial Projects and Services president Rodney Aulick said: “Evoqua is committed to being a leader in semiconductor water and for that matter – ultrapure water in total. We’re excited to have customers work side-by-side with us at this facility to learn how these advanced technologies can improve their manufacturing quality and uptime and reduce operational cost.”
